PVA TEPLA ION 100 Plasma Treatment System. Features Include: Plug and play self installation Flexible electrodes Industrial computer with LCD touch panel and keyboard. Windows based operating system. Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and Semi E95-1101 Multi-level user access Software Recipe editor for fast and versatile step controls Onboard diagnostic features and alarm logging Remote process monitoring via Ethernet Online web based simulation/training/support Pump power outlet on the chassis Energy saving feature—pump control TYPICAL APPLICATIONS: Surface cleaning Surface activation Surface functionalization Deposition of siloxane and organic thin films Technical Data Process Chamber Material: Aluminum Dimension: 375 mm W x 762 mm D x 375 mm H (14.75”x30”x14.75”) Volume: 107 L (3.78 ft3) Electrodes: 7 Shelf- each shelf 12.5" x 24.5" Number of MFCs: 3 Process Pressure: (0.16 to 2.66) mbar (120 to 2000) mTorr Base Pressure: 0.07 mbar (50 mTorr) Pumping Time: 1 min (Pump dependent) Loading: Manual Plasma Generator Frequency/power: 13.56 MHz/1000 W 230V, 3Ph, 50/60Hz